Onto Innovation
Assembly Line
Onto Innovation’s 4Di InSpec™ Automated Metrology System Receives 2024 Innovative System of the Year Award from FANUC America
Onto Innovation Inc. and its Tucson subsidiary 4D Technology today announced they’ve been named winner of FANUC America’s prestigious 2024 Innovative System of the Year award for the 4Di InSpec automated metrology system (AMS). The system enables automated surface defect and feature metrology for aviation, aerospace and other applications in the industrial manufacturing market. The patented, vibration-immune technology enables the unique capability of using non-contact, three-dimensional optical metrology on the production floor, providing new levels of defect inspection with micrometer-level resolution. In partnership with OptiPro Systems, the 4Di InSpec AMS systems were delivered in the second half of 2023 to several leading aerospace engine manufacturers.
Fabs Drive Deeper Into Machine Learning
For the past couple decades, semiconductor manufacturers have relied on computer vision, which is one of the earliest applications of machine learning in semiconductor manufacturing. Referred to as Automated Optical Inspection (AOI), these systems use signal processing algorithms to identify macro and micro physical deformations.
Defect detection provides a feedback loop for fab processing steps. Wafer test results produce bin maps (good or bad die), which also can be analyzed as images. Their data granularity is significantly larger than the pixelated data from an optical inspection tool. Yet test results from wafer maps can match the splatters generated during lithography and scratches produced from handling that AOI systems can miss. Thus, wafer test maps give useful feedback to the fab.